Fluid Device And Method For Controlling Fluid Device

A fluid device 10 includes: a flow path 20 through which a fluid containing a fine particle flows; an ultrasonic transmitter 60 configured to transmit an ultrasonic wave to the fluid in the flow path 20 in response to an input of a drive signal; a flow velocity measurement unit 40 configured to meas...

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Bibliographische Detailangaben
Hauptverfasser: ARAI, Yoshio, MIYASAKA, Mitsuru, TOMIOKA, Hiroto, KOJIMA, Chikara, KUBO, Keita
Format: Patent
Sprache:eng
Schlagworte:
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