OPTICAL PROXIMITY CORRECTION FOR FREE FORM SHAPES

Aspects of the disclosed technology relate to techniques for applying optical proximity correction to free form shapes. Each optical proximity correction iteration comprises: computing edge adjustment values for the straight ty correction iteration immediately preceding the each of the plurality of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Sakajiri, Kyohei, Lippincott, George P, Liubich, Vladislav
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CALCULATING CINEMATOGRAPHY COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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