PLASMA-RESISTANT GLASS AND MANUFACTURING METHOD THEREFOR

An embodiment of the present invention relates to a plasma-resistant glass, and a manufacturing method therefor, and the present invention is intended to provide a plasma-resistant glass having improved plasma resistance properties, and a manufacturing method therefor. To this end, the present inven...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KIM, Dae Gean, SEOK, Hye Won, KIM, Hyeong Jun
Format: Patent
Sprache:eng
Schlagworte:
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