MICROELECTRONIC DEVICES WITH SUPPORT PILLARS SPACED ALONG A SLIT REGION BETWEEN PILLAR ARRAY BLOCKS, AND RELATED METHODS AND SYSTEMS

A microelectronic device includes a stack structure comprising a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. At least one slit region divides the stack structure into blocks. Each block comprises an array of active pillars. Along the at least...

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Bibliographische Detailangaben
Hauptverfasser: Chandolu, Anilkumar, Chary, Indra V
Format: Patent
Sprache:eng
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