SEMICONDUCTOR MEMORY DEVICE
A semiconductor memory device includes a first channel pattern and a second channel pattern stacked on a substrate, a word line disposed between the first and second channel patterns and that extends in a first direction parallel to a top surface of the substrate, a data storage pattern disposed bet...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A semiconductor memory device includes a first channel pattern and a second channel pattern stacked on a substrate, a word line disposed between the first and second channel patterns and that extends in a first direction parallel to a top surface of the substrate, a data storage pattern disposed between a top surface of the word line and the first channel pattern and between a bottom surface of the word line and the second channel pattern, a bit line that extends in a second direction perpendicular to the top surface of the substrate and that is connected to first end portions of the first and second channel patterns, and a source line that extends in the second direction and is connected to second end portions of the first and second channel patterns. |
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