SEMICONDUCTOR MEMORY DEVICE

A semiconductor memory device includes a first channel pattern and a second channel pattern stacked on a substrate, a word line disposed between the first and second channel patterns and that extends in a first direction parallel to a top surface of the substrate, a data storage pattern disposed bet...

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Bibliographische Detailangaben
Hauptverfasser: LEE, KISEOK, KIM, KEUNNAM, KIM, HYUNCHEOL, KIM, YONGSEOK, LEE, KYUNGHWAN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor memory device includes a first channel pattern and a second channel pattern stacked on a substrate, a word line disposed between the first and second channel patterns and that extends in a first direction parallel to a top surface of the substrate, a data storage pattern disposed between a top surface of the word line and the first channel pattern and between a bottom surface of the word line and the second channel pattern, a bit line that extends in a second direction perpendicular to the top surface of the substrate and that is connected to first end portions of the first and second channel patterns, and a source line that extends in the second direction and is connected to second end portions of the first and second channel patterns.