OPTO-ELECTRICAL PROBE CARD PLATFORM FOR WAFER-LEVEL TESTING OF OPTICAL MEMS STRUCTURES

Aspects of the disclosure relate to an apparatus including an opto-electrical probe card platform for wafer-level testing of optical micro-electro-mechanical-systems (MEMS) structures. The probe card platform includes an electrical probe card including alignment needles for aligning with an optical...

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Bibliographische Detailangaben

Hauptverfasser:	Khalil, Diaa, Anwar, Momen, Badr, Mohamed, Saadany, Bassam, Mortada, Bassem, Sabry, Yasser M, Emad, Ahmed, Zeinah, Tarek Mohamed, Shebl, Ahmed, Ramadan, Mohamed, ElMassry, Moez, Hamouda, Mohamed
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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