ELECTRONIC DEVICES COMPRISING SEGMENTED HIGH-K DIELECTRIC MATERIALS AND STORAGE NODE MATERIALS, RELATED SYSTEMS, AND METHODS OF FORMING

An electronic device includes a stack structure including vertically alternating dielectric materials and conductive materials, the conductive materials including first regions and second regions, and pillars extending vertically through the stack structure, the pillars adjacent to the second region...

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Bibliographische Detailangaben
Hauptverfasser: Wong, Sok Han, Kim, Byeung Chul, Hong, Ye Xiang, Lan, Xin, Liu, Yifen, Huang, Yun
Format: Patent
Sprache:eng
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