METHOD OF MANUFACTURING SURFACE-EMITTING LASER ELEMENT

A method of manufacturing a surface-emitting laser, includes (a) forming a first semiconductor layer including a photonic-crystal (PC) layer, (b) growing, on the first semiconductor layer, an active layer and a second semiconductor layer, (c) performing spectrometry in which a thickness from a surfa...

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Bibliographische Detailangaben
Hauptverfasser: KOTANI, Hiroshi, NODA, Susumu, EMOTO, Kei, KOIZUMI, Tomoaki
Format: Patent
Sprache:eng
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