STRUCTURE AND FORMATION METHOD OF SEMICONDUCTOR DEVICE WITH EPITAXIAL STRUCTURES

A semiconductor device structure and a formation method are provided. The method includes forming a protruding structure over a substrate. The protruding structure has multiple sacrificial layers and multiple semiconductor layers, and the sacrificial layers and the semiconductor layers have an alter...

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Bibliographische Detailangaben
Hauptverfasser: HUANG, Yu-Ching, CHAN, Chien-Tai, LIN, Chien-Chih, YANG, Hsueh-Jen
Format: Patent
Sprache:eng
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