WIDE AREA ATMOSPHERIC PRESSURE PLASMA DEVICE

A wide area atmospheric pressure plasma device includes a metal casing, a metal electrode, and a dielectric layer. The metal casing includes a chamber, at least one gas channel, and a plasma jet channel, in which the plasma jet channel is located under the chamber. The metal electrode is disposed wi...

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Bibliographische Detailangaben
Hauptverfasser: WANG, Shih-Chang, CHEN, Po-Hsuan, WANG, Liang-Chun, CHEN, Huang-Wei, CHEN, Yung-Hao, HSU, Yi-Ming
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A wide area atmospheric pressure plasma device includes a metal casing, a metal electrode, and a dielectric layer. The metal casing includes a chamber, at least one gas channel, and a plasma jet channel, in which the plasma jet channel is located under the chamber. The metal electrode is disposed within the chamber, is adjacent to the plasma jet channel, and extends along a length direction of the plasma jet channel. An outlet of the gas channel is adjacent to a bottom of the metal electrode, such that a working gas in the gas channel is sprayed towards the bottom of the metal electrode. The dielectric layer wraps the metal electrode.