GUARDBANDS IN SUBSTRATE PROCESSING SYSTEMS

GUARDBANDS IN SUBSTRATE PROCESSING SYSTEMS

A method includes identifying trace data including a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates having property values that meet threshold values. The method further includes determining, based on a guardband, guardband...

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Hauptverfasser: Li, Fei, Iskandar, Jimmy, Moyne, James Robert
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
PHYSICS
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creator Li, Fei
Iskandar, Jimmy
Moyne, James Robert
description A method includes identifying trace data including a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates having property values that meet threshold values. The method further includes determining, based on a guardband, guardband violation data points of the plurality of data points of the trace data. The method further includes determining, based on the guardband violation data points, guardband violation shape characterization. Classification of additional guardband violation data points of additional trace data is to be based on the guardband violation shape characterization. Performance of a corrective action associated with the substrate processing system is based on the classification.
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subjects CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
PHYSICS
title GUARDBANDS IN SUBSTRATE PROCESSING SYSTEMS
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