GUARDBANDS IN SUBSTRATE PROCESSING SYSTEMS

A method includes identifying trace data including a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates having property values that meet threshold values. The method further includes generating, based on the trace data and a pl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Li, Fei, Iskandar, Jimmy, Moyne, James Robert
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING PHYSICS
Online-Zugang:	Volltext bestellen
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