Bio-Field Effect Transistor Device

A bioFET device includes a semiconductor substrate having a first surface and an opposite, parallel second surface and a plurality of bioFET sensors on the semiconductor substrate. Each of the bioFET sensors includes a gate formed on the first surface of the semiconductor substrate and a channel reg...

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Bibliographische Detailangaben
Hauptverfasser: Huang, Jui-Cheng, Huang, Yu-Jie, Huang, Shih-Fen, Chang, Hector, Cheng, Chun-Ren, Wen, Chin-Hua, Chen, Tung-Tsun, Chang, Yi-Hsien, Cheng, Sean, Lin, Ching-Hui
Format: Patent
Sprache:eng
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