SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BEAM INSPECTION

SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BEAM INSPECTION

Disclosed herein is an apparatus comprising: a source of charged particles configured to emit a beam of charged particles along a primary beam axis of the apparatus; a condenser lens configured to cause the beam to concentrate around the primary beam axis; an aperture; a first multi-pole lens; a sec...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: LIU, Xuedong, HU, Xuerang, JIANG, Youfei, REN, Weiming, CHEN, Zhongwei, XI, Qingpo
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator LIU, Xuedong
HU, Xuerang
JIANG, Youfei
REN, Weiming
CHEN, Zhongwei
XI, Qingpo
description Disclosed herein is an apparatus comprising: a source of charged particles configured to emit a beam of charged particles along a primary beam axis of the apparatus; a condenser lens configured to cause the beam to concentrate around the primary beam axis; an aperture; a first multi-pole lens; a second multi-pole lens; wherein the first multi-pole lens is downstream with respect to the condenser lens and upstream with respect to the second multi-pole lens; wherein the second multi-pole lens is downstream with respect to the first multi-pole lens and upstream with respect to the aperture.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2023360877A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2023360877A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2023360877A13</originalsourceid><addsrcrecordid>eNqNi0EKwjAQAHvxIOofFjwXagO21zXZNgGTLEl6LkXiSbRQ_49FfICngWFmW3BEy1cCDlRKjaE3rgdLSXsVAZ0CZMaAaYgUofMBvhEpWG0ycj0vhBaMi0wyGe_2xeY-PZZ8-HFXHDtKUpd5fo15madbfub3OMS6qoU4V23T4En8V30AF0sv2g</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BEAM INSPECTION</title><source>esp@cenet</source><creator>LIU, Xuedong ; HU, Xuerang ; JIANG, Youfei ; REN, Weiming ; CHEN, Zhongwei ; XI, Qingpo</creator><creatorcontrib>LIU, Xuedong ; HU, Xuerang ; JIANG, Youfei ; REN, Weiming ; CHEN, Zhongwei ; XI, Qingpo</creatorcontrib><description>Disclosed herein is an apparatus comprising: a source of charged particles configured to emit a beam of charged particles along a primary beam axis of the apparatus; a condenser lens configured to cause the beam to concentrate around the primary beam axis; an aperture; a first multi-pole lens; a second multi-pole lens; wherein the first multi-pole lens is downstream with respect to the condenser lens and upstream with respect to the second multi-pole lens; wherein the second multi-pole lens is downstream with respect to the first multi-pole lens and upstream with respect to the aperture.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20231109&amp;DB=EPODOC&amp;CC=US&amp;NR=2023360877A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20231109&amp;DB=EPODOC&amp;CC=US&amp;NR=2023360877A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>LIU, Xuedong</creatorcontrib><creatorcontrib>HU, Xuerang</creatorcontrib><creatorcontrib>JIANG, Youfei</creatorcontrib><creatorcontrib>REN, Weiming</creatorcontrib><creatorcontrib>CHEN, Zhongwei</creatorcontrib><creatorcontrib>XI, Qingpo</creatorcontrib><title>SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BEAM INSPECTION</title><description>Disclosed herein is an apparatus comprising: a source of charged particles configured to emit a beam of charged particles along a primary beam axis of the apparatus; a condenser lens configured to cause the beam to concentrate around the primary beam axis; an aperture; a first multi-pole lens; a second multi-pole lens; wherein the first multi-pole lens is downstream with respect to the condenser lens and upstream with respect to the second multi-pole lens; wherein the second multi-pole lens is downstream with respect to the first multi-pole lens and upstream with respect to the aperture.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNi0EKwjAQAHvxIOofFjwXagO21zXZNgGTLEl6LkXiSbRQ_49FfICngWFmW3BEy1cCDlRKjaE3rgdLSXsVAZ0CZMaAaYgUofMBvhEpWG0ycj0vhBaMi0wyGe_2xeY-PZZ8-HFXHDtKUpd5fo15madbfub3OMS6qoU4V23T4En8V30AF0sv2g</recordid><startdate>20231109</startdate><enddate>20231109</enddate><creator>LIU, Xuedong</creator><creator>HU, Xuerang</creator><creator>JIANG, Youfei</creator><creator>REN, Weiming</creator><creator>CHEN, Zhongwei</creator><creator>XI, Qingpo</creator><scope>EVB</scope></search><sort><creationdate>20231109</creationdate><title>SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BEAM INSPECTION</title><author>LIU, Xuedong ; HU, Xuerang ; JIANG, Youfei ; REN, Weiming ; CHEN, Zhongwei ; XI, Qingpo</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2023360877A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2023</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><toplevel>online_resources</toplevel><creatorcontrib>LIU, Xuedong</creatorcontrib><creatorcontrib>HU, Xuerang</creatorcontrib><creatorcontrib>JIANG, Youfei</creatorcontrib><creatorcontrib>REN, Weiming</creatorcontrib><creatorcontrib>CHEN, Zhongwei</creatorcontrib><creatorcontrib>XI, Qingpo</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>LIU, Xuedong</au><au>HU, Xuerang</au><au>JIANG, Youfei</au><au>REN, Weiming</au><au>CHEN, Zhongwei</au><au>XI, Qingpo</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BEAM INSPECTION</title><date>2023-11-09</date><risdate>2023</risdate><abstract>Disclosed herein is an apparatus comprising: a source of charged particles configured to emit a beam of charged particles along a primary beam axis of the apparatus; a condenser lens configured to cause the beam to concentrate around the primary beam axis; an aperture; a first multi-pole lens; a second multi-pole lens; wherein the first multi-pole lens is downstream with respect to the condenser lens and upstream with respect to the second multi-pole lens; wherein the second multi-pole lens is downstream with respect to the first multi-pole lens and upstream with respect to the aperture.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_US2023360877A1
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BEAM INSPECTION
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-24T21%3A43%3A30IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=LIU,%20Xuedong&rft.date=2023-11-09&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2023360877A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true