CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTRATE CLEANING APPARATUS

In one embodiment of the present invention, a cleaning member 90 is attached to the surface of a cleaning member attaching part 10. The cleaning member attaching part 10 has a main body 20, a cleaning liquid introduction part 30 extending inside the main body 20, and a plurality of cleaning liquid s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MARUYAMA, Toru, MOTOSHIMA, Yasuyuki, UOZUMI, Shuji
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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