LIGHT SOURCE SYSTEM, UNIT, AND LASER APPARATUS

Provided is a light source system capable of easily performing optical axis adjustment between units. The light source system includes a second unit that detects an optical axis and performs at least one of adjustment or monitoring of a laser beam, and a third unit that performs optical axis adjustm...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KAJIO, Yusuke, ISHIHAMA, Yasuyuki, KONDO, Masaya, ENDO, Kuni, TAKEUCHI, Taichi, SHIMIZU, Misaki, SAKAI, Kentarou
Format: Patent
Sprache:eng
Schlagworte:
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