Charged Particle Beam Source and Charged Particle Beam System

Provided is a charged particle beam source having an emitter that can be replaced easily. The charged particle beam source includes an electron gun chamber; a first unit including both a supportive insulative member mechanically supporting a cable and a first set of terminals electrically connected...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Fukuda, Tomohisa, Okano, Yasuyuki, Yamamoto, Keiichi, Arima, Norikazu, Kamino, Kyouichi
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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