SEMICONDUCTOR MEMORY DEVICE

According to one embodiment, a semiconductor memory device includes a stacked body with first conductive layers and first insulating layers alternately stacked. The stacked body includes a staircase portion in which the first conductive layers are in a staircase shape. A columnar portion extends in...

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Bibliographische Detailangaben

Hauptverfasser:	SHIMIZU, Kojiro, WATANABE, Shigehiro
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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