SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME

A semiconductor memory device includes a substrate including a trench and a contact recess, a direct contact placed inside the trench and having a width smaller than a width of the trench, a bit line structure placed on the direct contact and having a width smaller than the width of the trench, a sp...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHIM, Hyun-Chul, LEE, Da In, SEO, Chang Woo, SONG, Su Youn, YOO, Won Seok, SONG, Jeong Eun
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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