THROUGH ELECTRODE SUBSTRATE AND SEMICONDUCTOR DEVICE

A through electrode substrate includes: a substrate having a first surface and a second surface facing the first surface; through electrodes penetrating through the substrate; and a first capacitor including a first conductive layer, an insulating layer, and a second conductive layer, arranged on th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KURAMOCHI, Satoru, TAKANO, Takamasa
Format: Patent
Sprache:eng
Schlagworte:
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