SEMICONDUCTOR DEVICES HAVING CELL ARRAY AND PERIPHERAL REGIONS THEREIN

SEMICONDUCTOR DEVICES HAVING CELL ARRAY AND PERIPHERAL REGIONS THEREIN

A semiconductor device includes a substrate having first and second active patterns therein, which are spaced apart from each other. The first active pattern has a top surface that is elevated relative to a top surface of the second active pattern. A channel semiconductor layer is provided on the to...

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Hauptverfasser: Kil, Gyuhyun, Back, Doosan, Ju, Jungmin, Han, Jung-Hoon, Choi, Hyebin, Choi, Ahrang
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creator Kil, Gyuhyun
Back, Doosan
Ju, Jungmin
Han, Jung-Hoon
Choi, Hyebin
Choi, Ahrang
description A semiconductor device includes a substrate having first and second active patterns therein, which are spaced apart from each other. The first active pattern has a top surface that is elevated relative to a top surface of the second active pattern. A channel semiconductor layer is provided on the top surface of the first active pattern. A first gate pattern is provided, which includes a first insulating pattern, on the channel semiconductor layer. A second gate pattern is provided, which includes a second insulating pattern having a thickness greater than a thickness of the first insulating pattern, on the top surface of the second active pattern.
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title SEMICONDUCTOR DEVICES HAVING CELL ARRAY AND PERIPHERAL REGIONS THEREIN
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