SEMICONDUCTOR SUBSTRATE HAVING AN ALIGNMENT STRUCTURE

A semiconductor substrate includes a semiconductor base substrate. An alignment structure is formed on a surface of the semiconductor base substrate. An epitaxial layer is deposited on the surface of the semiconductor base substrate. The alignment structure includes an area of the surface of the sem...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kuenle, Matthias, Huber, Thomas, Ortner, Joerg, Moder, Iris
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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