SEMICONDUCTOR DEVICES AND DATA STORAGE SYSTEMS INCLUDING THE SAME

A semiconductor device includes a source structure, gate electrodes spaced apart from each other and stacked in a first direction, perpendicular to an upper surface of the source structure, and a channel structure extending through the gate electrodes in the first direction, and including a dielectr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kim, Taeyoung, Lee, Bongyong, Hayakawa, Yukio, Cho, Siyeon, Park, Hyunmog
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY INFORMATION STORAGE PHYSICS STATIC STORES
Online-Zugang:	Volltext bestellen
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