LAMINATE, RELEASE AGENT COMPOSITION, AND METHOD FOR MANUFACTURING PROCESSED SEMICONDUCTOR SUBSTRATE

A laminate having a semiconductor substrate, a UV-ray-transmissive support substrate, and an adhesive layer and a release layer disposed between the semiconductor substrate and the support substrate. The release layer is a film formed from a releasing agent composition containing a polymer of an eth...

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Bibliographische Detailangaben
Hauptverfasser: YANAI, Masaki, OKUNO, Takahisa, OGATA, Hiroto, MORIYA, Shunsuke
Format: Patent
Sprache:eng
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