LOADER DEVICE AND SUBSTRATE TRANSPORT SYSTEM
A loader device includes a frame, a first opening formed in a first side surface of the frame, a second opening formed on a second side surface of the frame, a cavity that connects the first opening and the second opening, a transport unit in the cavity, a first sensor that senses a presence or abse...
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| creator | KANG, Seung Gyu PARK, Chul-Jun AHN, Yong-Jun LIM, Jeong Hun KANG, HYUN JAE LEE, Hyun Woo KIM, Young Wook LEE, Sang Kyung |
| description | A loader device includes a frame, a first opening formed in a first side surface of the frame, a second opening formed on a second side surface of the frame, a cavity that connects the first opening and the second opening, a transport unit in the cavity, a first sensor that senses a presence or absence of a first substrate carrier, a second sensor that senses access of a person, and a controller that receives a first sensor signal from the first sensor and receives a second sensor signal from the second sensor. In response to the first sensor signal, the controller controls the transport unit to not transfer a second substrate carrier to the first opening, controls the transport unit to pick up the first substrate carrier from the first opening, and interrupts operation of the transport unit in response to the second sensor signal. |
| format | Patent |
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In response to the first sensor signal, the controller controls the transport unit to not transfer a second substrate carrier to the first opening, controls the transport unit to pick up the first substrate carrier from the first opening, and interrupts operation of the transport unit in response to the second sensor signal.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CHAMBERS PROVIDED WITH MANIPULATION DEVICES HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS TRANSPORTING |
| title | LOADER DEVICE AND SUBSTRATE TRANSPORT SYSTEM |
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