INTEGRATED SUBSTRATE MEASUREMENT SYSTEM

An apparatus includes a substrate holder, a first actuator to rotate the substrate holder, a second actuator to move the substrate holder linearly, a first sensor to generate one or more first measurements or images of the substrate, a second sensor to generate one or more second measurements of tar...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Celik, Ozkan, Freeman, Gregory John, Kutney, Michael, Ramachandraiah, Arunkumar, Schulze, Patricia, Zhu, Zhaozhao, Chou, Chih Chung
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
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