DETECTION OF STRUCTURES

A method for detecting structures is provided. The method can include receiving inspection image data characterizing a region of interest of an object being inspected. The regions of interest can include one or more structures of the object. The method can also include determining, using a computer...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Suppes, Alexander, Tran Vu, Dang Hai
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS
Online-Zugang:	Volltext bestellen
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