TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS
According to one aspect of the technique of the present disclosure, there is provided a temperature control method including: (a) controlling a current heater supply power such that a predicted temperature column calculated according to a prediction model stored in advance approaches a future target...
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| creator | YAMAGUCHI, Hideto SHIGEMATSU, Seiya UENO, Masaaki SUGISHITA, Masashi MAEDA, Shuhei |
| description | According to one aspect of the technique of the present disclosure, there is provided a temperature control method including: (a) controlling a current heater supply power such that a predicted temperature column calculated according to a prediction model stored in advance approaches a future target temperature column, wherein the future target temperature column is updated in accordance with a current temperature, a final target temperature and one of a temperature convergence ramp rate and a designated temperature convergence time. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2023221700A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2023221700A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2023221700A13</originalsourceid><addsrcrecordid>eNqNjr0KAjEQhK-xEPUdFmw9OM_Cek32NGB-2GwEKxGJlejB-Tw-qznwAawGZr4ZZlp9hGwgRklMoLwT9kewJAevVz8F34FFlzpUhTJuD5GsKaxOSjyDppNRtALnXS2MLprinsuYDUmIaybUuDsSMCnPehywpE2ygE5DTLtYWkIQ2CuKccwxBBw_xXk1uV8fQ178dFYtOxJ1qHP_uuShv97yM78vKbZNu2nb9bZpcL35j_oClhJGHw</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS</title><source>esp@cenet</source><creator>YAMAGUCHI, Hideto ; SHIGEMATSU, Seiya ; UENO, Masaaki ; SUGISHITA, Masashi ; MAEDA, Shuhei</creator><creatorcontrib>YAMAGUCHI, Hideto ; SHIGEMATSU, Seiya ; UENO, Masaaki ; SUGISHITA, Masashi ; MAEDA, Shuhei</creatorcontrib><description>According to one aspect of the technique of the present disclosure, there is provided a temperature control method including: (a) controlling a current heater supply power such that a predicted temperature column calculated according to a prediction model stored in advance approaches a future target temperature column, wherein the future target temperature column is updated in accordance with a current temperature, a final target temperature and one of a temperature convergence ramp rate and a designated temperature convergence time.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; CONTROL OR REGULATING SYSTEMS IN GENERAL ; CONTROLLING ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS ; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS ; PHYSICS ; REGULATING ; SEMICONDUCTOR DEVICES</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230713&DB=EPODOC&CC=US&NR=2023221700A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230713&DB=EPODOC&CC=US&NR=2023221700A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YAMAGUCHI, Hideto</creatorcontrib><creatorcontrib>SHIGEMATSU, Seiya</creatorcontrib><creatorcontrib>UENO, Masaaki</creatorcontrib><creatorcontrib>SUGISHITA, Masashi</creatorcontrib><creatorcontrib>MAEDA, Shuhei</creatorcontrib><title>TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS</title><description>According to one aspect of the technique of the present disclosure, there is provided a temperature control method including: (a) controlling a current heater supply power such that a predicted temperature column calculated according to a prediction model stored in advance approaches a future target temperature column, wherein the future target temperature column is updated in accordance with a current temperature, a final target temperature and one of a temperature convergence ramp rate and a designated temperature convergence time.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CONTROL OR REGULATING SYSTEMS IN GENERAL</subject><subject>CONTROLLING</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</subject><subject>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</subject><subject>PHYSICS</subject><subject>REGULATING</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjr0KAjEQhK-xEPUdFmw9OM_Cek32NGB-2GwEKxGJlejB-Tw-qznwAawGZr4ZZlp9hGwgRklMoLwT9kewJAevVz8F34FFlzpUhTJuD5GsKaxOSjyDppNRtALnXS2MLprinsuYDUmIaybUuDsSMCnPehywpE2ygE5DTLtYWkIQ2CuKccwxBBw_xXk1uV8fQ178dFYtOxJ1qHP_uuShv97yM78vKbZNu2nb9bZpcL35j_oClhJGHw</recordid><startdate>20230713</startdate><enddate>20230713</enddate><creator>YAMAGUCHI, Hideto</creator><creator>SHIGEMATSU, Seiya</creator><creator>UENO, Masaaki</creator><creator>SUGISHITA, Masashi</creator><creator>MAEDA, Shuhei</creator><scope>EVB</scope></search><sort><creationdate>20230713</creationdate><title>TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS</title><author>YAMAGUCHI, Hideto ; SHIGEMATSU, Seiya ; UENO, Masaaki ; SUGISHITA, Masashi ; MAEDA, Shuhei</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2023221700A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2023</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CONTROL OR REGULATING SYSTEMS IN GENERAL</topic><topic>CONTROLLING</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</topic><topic>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</topic><topic>PHYSICS</topic><topic>REGULATING</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>YAMAGUCHI, Hideto</creatorcontrib><creatorcontrib>SHIGEMATSU, Seiya</creatorcontrib><creatorcontrib>UENO, Masaaki</creatorcontrib><creatorcontrib>SUGISHITA, Masashi</creatorcontrib><creatorcontrib>MAEDA, Shuhei</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>YAMAGUCHI, Hideto</au><au>SHIGEMATSU, Seiya</au><au>UENO, Masaaki</au><au>SUGISHITA, Masashi</au><au>MAEDA, Shuhei</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS</title><date>2023-07-13</date><risdate>2023</risdate><abstract>According to one aspect of the technique of the present disclosure, there is provided a temperature control method including: (a) controlling a current heater supply power such that a predicted temperature column calculated according to a prediction model stored in advance approaches a future target temperature column, wherein the future target temperature column is updated in accordance with a current temperature, a final target temperature and one of a temperature convergence ramp rate and a designated temperature convergence time.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES |
| title | TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS |
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