LAYOUT METHOD OF SEMICONDUCTOR CHIP, SEMICONDUCTOR CHIP MANUFACTURING METHOD AND COMPUTING DEVICE USING SAME

A layout method of a semiconductor chip, includes designing a layout using a restriction rule such that a layout pattern having a length smaller than a first length in a first direction has to have a length smaller than a second length in a second direction, the second direction intersecting the fir...

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Bibliographische Detailangaben
Hauptverfasser: Lee, Sanghwa, Chung, Noyoung, Misaka, Akio, Kim, Taekyum, Choi, Woonhyuk
Format: Patent
Sprache:eng
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Zusammenfassung:A layout method of a semiconductor chip, includes designing a layout using a restriction rule such that a layout pattern having a length smaller than a first length in a first direction has to have a length smaller than a second length in a second direction, the second direction intersecting the first direction, generating a plurality of unit regions by partitioning the layout in the first direction, generating a plurality of target regions by adding a reference region to a partitioned edge of each of the plurality of unit regions, retargeting the plurality of target regions in parallel, and generating a correction layout by merging the plurality of retargeted target regions.