EMBEDDED MEMORY WITH DOUBLE-WALLED FERROELECTRIC CAPACITORS

EMBEDDED MEMORY WITH DOUBLE-WALLED FERROELECTRIC CAPACITORS

Integrated circuits with embedded memory that includes double-walled ferroelectric capacitors over an array of access transistors. Capacitor access transistors may be recessed channel array transistors (RCATs) implemented in a monocrystalline material that has been transferred from a donor wafer, or...

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Bibliographische Detailangaben
Hauptverfasser: Sharma, Abhishek Anil, Gomes, Wilfred, Avci, Uygar
Format: Patent
Sprache:eng
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Zusammenfassung:Integrated circuits with embedded memory that includes double-walled ferroelectric capacitors over an array of access transistors. Capacitor access transistors may be recessed channel array transistors (RCATs) implemented in a monocrystalline material that has been transferred from a donor wafer, or implemented in an amorphous or polycrystalline semiconductor material that has been deposited, such as a metal oxide semiconductor.