BUFFER UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME

Disclosed are a buffer unit, in which a plurality of support plates is stacked in a vertical direction and a connection block is provided between the plurality of support plates to prevent vibration generated at the lower end of the support plate from being transmitted from the upper support plate,...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Bae, Jong Kook, Jeong, Hyun Yang, Kim, Chang Ho, Eom, Sung Hun, Yun, Tae Won
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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