SENSOR DEVICE

A sensor device includes an electrically conductive base substrate defining a first electrode kept at a reference potential, a membrane defining a second electrode that changes a position thereof in response to a change of surrounding pressure and faces the base substrate, a casing that is kept at t...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	SUGIBAYASHI, Hideaki
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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