HYBRID MATCHER AND RADIO FREQUENCY MATCHING SYSTEM INCLUDING THE HYBRID MATCHER
Provided are a hybrid matcher capable of precisely performing impedance matching at a high speed when RF power is applied with a multi-level pulse in a facility using RF plasma, and an RF matching system including the hybrid matcher. The hybrid matcher includes a matching circuit in which a pluralit...
Gespeichert in:
| Hauptverfasser: | , , , , , , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | KIM, Hyosin KIM, Dongyub KIM, Minsung LIM, Sungyong MOON, Jongbeom SHIM, Seungbo KIM, Sungyeol |
| description | Provided are a hybrid matcher capable of precisely performing impedance matching at a high speed when RF power is applied with a multi-level pulse in a facility using RF plasma, and an RF matching system including the hybrid matcher. The hybrid matcher includes a matching circuit in which a plurality of variable element-switch sets are connected to each other in parallel, the variable element-switch sets each including a variable impedance element and a switch connected to the variable impedance element in series and electrically operating therewith, a sensor disposed at a front stage of the matching circuit and configured to measure a current and a voltage of radio frequency (RF) power applied from an RF generator, a variable element driver configured to drive the variable impedance element, a switch driver configured to drive the switch, and a controller configured to control the variable element driver and the switch driver. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2023187175A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2023187175A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2023187175A13</originalsourceid><addsrcrecordid>eNrjZPD3iHQK8nRR8HUMcfZwDVJw9HNRCHJ08fRXcAtyDQx19XOOhMh5-rkrBEcGh7j6Knj6OfuEuoAEQjxcFVAN4GFgTUvMKU7lhdLcDMpurkAZ3dSC_PjU4oLE5NS81JL40GAjAyNjQwtzQ3NTR0Nj4lQBAO91L6A</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>HYBRID MATCHER AND RADIO FREQUENCY MATCHING SYSTEM INCLUDING THE HYBRID MATCHER</title><source>esp@cenet</source><creator>KIM, Hyosin ; KIM, Dongyub ; KIM, Minsung ; LIM, Sungyong ; MOON, Jongbeom ; SHIM, Seungbo ; KIM, Sungyeol</creator><creatorcontrib>KIM, Hyosin ; KIM, Dongyub ; KIM, Minsung ; LIM, Sungyong ; MOON, Jongbeom ; SHIM, Seungbo ; KIM, Sungyeol</creatorcontrib><description>Provided are a hybrid matcher capable of precisely performing impedance matching at a high speed when RF power is applied with a multi-level pulse in a facility using RF plasma, and an RF matching system including the hybrid matcher. The hybrid matcher includes a matching circuit in which a plurality of variable element-switch sets are connected to each other in parallel, the variable element-switch sets each including a variable impedance element and a switch connected to the variable impedance element in series and electrically operating therewith, a sensor disposed at a front stage of the matching circuit and configured to measure a current and a voltage of radio frequency (RF) power applied from an RF generator, a variable element driver configured to drive the variable impedance element, a switch driver configured to drive the switch, and a controller configured to control the variable element driver and the switch driver.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; BASIC ELECTRONIC CIRCUITRY ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS ; RESONATORS</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230615&DB=EPODOC&CC=US&NR=2023187175A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,782,887,25573,76557</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230615&DB=EPODOC&CC=US&NR=2023187175A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KIM, Hyosin</creatorcontrib><creatorcontrib>KIM, Dongyub</creatorcontrib><creatorcontrib>KIM, Minsung</creatorcontrib><creatorcontrib>LIM, Sungyong</creatorcontrib><creatorcontrib>MOON, Jongbeom</creatorcontrib><creatorcontrib>SHIM, Seungbo</creatorcontrib><creatorcontrib>KIM, Sungyeol</creatorcontrib><title>HYBRID MATCHER AND RADIO FREQUENCY MATCHING SYSTEM INCLUDING THE HYBRID MATCHER</title><description>Provided are a hybrid matcher capable of precisely performing impedance matching at a high speed when RF power is applied with a multi-level pulse in a facility using RF plasma, and an RF matching system including the hybrid matcher. The hybrid matcher includes a matching circuit in which a plurality of variable element-switch sets are connected to each other in parallel, the variable element-switch sets each including a variable impedance element and a switch connected to the variable impedance element in series and electrically operating therewith, a sensor disposed at a front stage of the matching circuit and configured to measure a current and a voltage of radio frequency (RF) power applied from an RF generator, a variable element driver configured to drive the variable impedance element, a switch driver configured to drive the switch, and a controller configured to control the variable element driver and the switch driver.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>BASIC ELECTRONIC CIRCUITRY</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS</subject><subject>RESONATORS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZPD3iHQK8nRR8HUMcfZwDVJw9HNRCHJ08fRXcAtyDQx19XOOhMh5-rkrBEcGh7j6Knj6OfuEuoAEQjxcFVAN4GFgTUvMKU7lhdLcDMpurkAZ3dSC_PjU4oLE5NS81JL40GAjAyNjQwtzQ3NTR0Nj4lQBAO91L6A</recordid><startdate>20230615</startdate><enddate>20230615</enddate><creator>KIM, Hyosin</creator><creator>KIM, Dongyub</creator><creator>KIM, Minsung</creator><creator>LIM, Sungyong</creator><creator>MOON, Jongbeom</creator><creator>SHIM, Seungbo</creator><creator>KIM, Sungyeol</creator><scope>EVB</scope></search><sort><creationdate>20230615</creationdate><title>HYBRID MATCHER AND RADIO FREQUENCY MATCHING SYSTEM INCLUDING THE HYBRID MATCHER</title><author>KIM, Hyosin ; KIM, Dongyub ; KIM, Minsung ; LIM, Sungyong ; MOON, Jongbeom ; SHIM, Seungbo ; KIM, Sungyeol</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2023187175A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2023</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>BASIC ELECTRONIC CIRCUITRY</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><topic>IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS</topic><topic>RESONATORS</topic><toplevel>online_resources</toplevel><creatorcontrib>KIM, Hyosin</creatorcontrib><creatorcontrib>KIM, Dongyub</creatorcontrib><creatorcontrib>KIM, Minsung</creatorcontrib><creatorcontrib>LIM, Sungyong</creatorcontrib><creatorcontrib>MOON, Jongbeom</creatorcontrib><creatorcontrib>SHIM, Seungbo</creatorcontrib><creatorcontrib>KIM, Sungyeol</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KIM, Hyosin</au><au>KIM, Dongyub</au><au>KIM, Minsung</au><au>LIM, Sungyong</au><au>MOON, Jongbeom</au><au>SHIM, Seungbo</au><au>KIM, Sungyeol</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>HYBRID MATCHER AND RADIO FREQUENCY MATCHING SYSTEM INCLUDING THE HYBRID MATCHER</title><date>2023-06-15</date><risdate>2023</risdate><abstract>Provided are a hybrid matcher capable of precisely performing impedance matching at a high speed when RF power is applied with a multi-level pulse in a facility using RF plasma, and an RF matching system including the hybrid matcher. The hybrid matcher includes a matching circuit in which a plurality of variable element-switch sets are connected to each other in parallel, the variable element-switch sets each including a variable impedance element and a switch connected to the variable impedance element in series and electrically operating therewith, a sensor disposed at a front stage of the matching circuit and configured to measure a current and a voltage of radio frequency (RF) power applied from an RF generator, a variable element driver configured to drive the variable impedance element, a switch driver configured to drive the switch, and a controller configured to control the variable element driver and the switch driver.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_epo_espacenet_US2023187175A1 |
| source | esp@cenet |
| subjects | BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS |
| title | HYBRID MATCHER AND RADIO FREQUENCY MATCHING SYSTEM INCLUDING THE HYBRID MATCHER |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-03T09%3A40%3A00IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=KIM,%20Hyosin&rft.date=2023-06-15&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2023187175A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |