APPARATUS AND METHOD OF SUPPLYING CHEMICAL LIQUID AND SUBSTRATE TREATING APPARATUS

Provided is an apparatus for supplying a chemical liquid, the apparatus including: a storage tank in which a chemical liquid is stored; a discharge line through which the chemical liquid stored in the storage tank is discharged; a level tube connected to the storage tank so as to check a water level...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Park, Sang Woo, Ha, Do Gyeong, YUN, Tae Suk, Yang, Seung Tae, Choi, Moon Soon, Jung, Bu Young, Lim, Chae Young
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PERFORMING OPERATIONS PHYSICS SPRAYING OR ATOMISING IN GENERAL TESTING TRANSPORTING
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