COATING DEVICE

A coating device includes: a stage transfer part including a first long shaft extending in a first direction and a second long shaft extending in a second direction intersecting the first direction; a stage tilting part disposed on the stage transfer part, where the stage tiling part swings about a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KIM, Jong Hyup, BACK, Sang Hoon, KIM, Hyun Jin, YANG, Hae Wook, KIM, Yong Hwan, BAE, Min Ho
Format: Patent
Sprache:eng
Schlagworte:
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