IMPROVED NICKEL CHROMIUM ALUMINUM THIN FILM RESISTOR

An integrated circuit includes a thin film resistor body that is formed over a dielectric layer. An interfacial layer is formed on the thin film resistor body and resistor heads are formed on the interfacial layer. The thin film resistor body includes nickel chromium aluminum (NiCrAl) and the resist...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Bauer, Gernot Manfred, Schachtschneider, Kai-Alexander
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRICITY RESISTORS
Online-Zugang:	Volltext bestellen
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