Multi-Finger Transistor Structure and Method of Manufacturing the Same

A multi-finger transistor structure is provided in the present invention, including multiple active areas, a gate structure consisting of multiple gate parts and connecting parts, wherein each gate part crosses over one of the active areas and each connecting part alternatively connects one end and...

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Hauptverfasser: Sihombing, Rudy Octavius, Verma, Purakh Raj, Parthasarathy, Shyam, LIAO, JINYU, Xing, Su
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creator Sihombing, Rudy Octavius
Verma, Purakh Raj
Parthasarathy, Shyam
LIAO, JINYU
Xing, Su
description A multi-finger transistor structure is provided in the present invention, including multiple active areas, a gate structure consisting of multiple gate parts and connecting parts, wherein each gate part crosses over one of the active areas and each connecting part alternatively connects one end and the other end of the gate parts so as to form a meander gate structure, and multiple sources and drains, wherein one source and one drain are set between two adjacent gate parts, and each gate parts is accompanied by one source and one drain at two sides respectively, and the distance between the drain and the gate part is larger than the distance between the source and the gate part, so that the source and the drain are asymmetric with respect to the corresponding gate part, and air gaps are formed in the dielectric layer between each drain and the corresponding gate part.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Multi-Finger Transistor Structure and Method of Manufacturing the Same
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