INTEGRATED CIRCUIT HAVING IMPROVED ASML ALIGNMENT MARKS

A photo alignment structure is provided that includes a wafer having scribe lines defined therein in a top planar surface of the wafer. An alignment structure is disposed on a top planar surface of the wafer longitudinally aligned with a portion of selected scribe lines, where the alignment structur...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Hallowell, James Thomas, Meisner, Stephen Arlon, Wyant, Michael Todd
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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