METAL-INSULATOR-METAL CAPACITORS

A metal-insulator-metal (MIM) capacitor includes a first group of metal contacts disposed on a first region of an isolation layer spaced apart from each other in a first direction, a second group of metal contacts disposed on a second region of the isolation layer spaced apart from each other in the...

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Bibliographische Detailangaben
Hauptverfasser: LEE, Mun Young, KWON, Kyung Wook, CHOI, Myoung Kyun
Format: Patent
Sprache:eng
Schlagworte:
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