EXCIMER LAMP ELECTRODE GEOMETRY

An excimer lamp includes a plurality of arc tubes and an electrode pair. The electrode pair comprises a plurality of elongated electrode plates extending along a tube axis direction of the plurality of arc tubes. Each electrode plate comprises a polarity opposite that of an adjacent electrode plate...

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Bibliographische Detailangaben
Hauptverfasser: PEARSON, MATTHEW ROBERT, LEE, YONGDUK
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An excimer lamp includes a plurality of arc tubes and an electrode pair. The electrode pair comprises a plurality of elongated electrode plates extending along a tube axis direction of the plurality of arc tubes. Each electrode plate comprises a polarity opposite that of an adjacent electrode plate (i.e., alternating polarities). The plurality of arc tubes and the plurality of electrode plates are disposed in an alternating side-by-side orientation such that an arc tube of the plurality of arc tubes is disposed between adjacent electrode plates of the plurality of electrode plates.