LEARNABLE DEFECT DETECTION FOR SEMICONDUCTOR APPLICATIONS

LEARNABLE DEFECT DETECTION FOR SEMICONDUCTOR APPLICATIONS

Methods and systems for learnable defect detection for semiconductor applications are provided. One system includes a deep metric learning defect detection model configured for projecting a test image for a specimen and a corresponding reference image into latent space, determining a distance in the...

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Hauptverfasser: Yuan, Zhuoning, Zhang, Jing, Dong, Yujie, Bhaskar, Kris
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
PHYSICS
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creator Yuan, Zhuoning
Zhang, Jing
Dong, Yujie
Bhaskar, Kris
description Methods and systems for learnable defect detection for semiconductor applications are provided. One system includes a deep metric learning defect detection model configured for projecting a test image for a specimen and a corresponding reference image into latent space, determining a distance in the latent space between one or more different portions of the test image and corresponding portion(s) of the corresponding reference image, and detecting defects in the one or more different portions of the test image based on the determined distances. Another system includes a learnable low-rank reference image generator configured for removing noise from one or more test images for a specimen thereby generating one or more reference images corresponding to the one or more test images.
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subjects CALCULATING
COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
PHYSICS
title LEARNABLE DEFECT DETECTION FOR SEMICONDUCTOR APPLICATIONS
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