APPARATUS, SYSTEM AND METHOD FOR PROVIDING A SEMICONDUCTOR WAFER LEVELING RIM

An apparatus, system and method for a wafer leveling rim, and for installing a wafer leveling rim. The leveling rim for a semiconductor wafer may include: a thin, substantially rigid receiver ring suitable to receive a circumferential rim of the semiconductor wafer; and a substantially flexible cont...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	BOSBOOM, JEROEN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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