SIMULATION APPARATUS, CONTROL METHOD OF SIMULATION APPARATUS, AND COMPUTER-READABLE STORAGE MEDIUM

A simulation apparatus predicts a behavior of a curable composition in a formation process in which the curable composition arranged on a shot region of a substrate and a mold are brought into contact with each other to form a film of the curable composition on the shot region. The apparatus include...

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Bibliographische Detailangaben
Hauptverfasser: Katsuta, Ken, Oguchi, Yuichiro
Format: Patent
Sprache:eng
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Zusammenfassung:A simulation apparatus predicts a behavior of a curable composition in a formation process in which the curable composition arranged on a shot region of a substrate and a mold are brought into contact with each other to form a film of the curable composition on the shot region. The apparatus includes a processor configured to obtain the behavior of the curable composition by simulation computation, and output data used to display a simulation image simulating the behavior obtained by the simulation computation. The simulation image includes information of an outer periphery of the shot region and information of an edge portion of the film, which are drawn in a mode that enables visual identification of a position of the edge portion of the film with respect to the outer periphery.