EXTENDED LIFETIME DUAL INDIRECTLY-HEATED CATHODE ION SOURCE

An ion source has an arc chamber with a first end and a second end. A first cathode at the first end of the arc chamber has a first cathode body and a first filament disposed within the first cathode body. A second cathode at the second end of the arc chamber has a second cathode body and a second f...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Platow, Wilhelm, Bassom, Neil, David, Jonathan
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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