EMBEDDED MEMORY PILLAR

A memory device is provided. The memory device includes a memory stack on a first dielectric layer, and a sidewall spacer on the memory stack. The memory device further includes a conductive cap on the sidewall spacer and the memory stack and an upper metal line on the conductive cap and the sidewal...

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Hauptverfasser: De Silva, Ekmini Anuja, Dutta, Ashim, Schmidt, Daniel, Kong, Dexin
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Sprache:eng
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creator De Silva, Ekmini Anuja
Dutta, Ashim
Schmidt, Daniel
Kong, Dexin
description A memory device is provided. The memory device includes a memory stack on a first dielectric layer, and a sidewall spacer on the memory stack. The memory device further includes a conductive cap on the sidewall spacer and the memory stack and an upper metal line on the conductive cap and the sidewall spacer, wherein the upper metal line wraps around the conductive cap, sidewall spacer, and memory stack.
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title EMBEDDED MEMORY PILLAR
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