ARTICLES OF CONTROLLABLY BONDED SHEETS AND METHODS FOR MAKING SAME

Described herein are articles and methods of making articles, including a first sheet and a second sheet, wherein the thin sheet and carrier are bonded together using a coating layer, preferably a hydrocarbon polymer coating layer, and associated deposition methods and inert gas treatments that may...

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Bibliographische Detailangaben
Hauptverfasser: Guryanov, Georgiy M, Adib, Kaveh, Liu, Shiwen, Mazumder, Prantik, Feng, Jiangwei, Bellman, Robert Alan, Liang, Jhih-Wei
Format: Patent
Sprache:eng
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Zusammenfassung:Described herein are articles and methods of making articles, including a first sheet and a second sheet, wherein the thin sheet and carrier are bonded together using a coating layer, preferably a hydrocarbon polymer coating layer, and associated deposition methods and inert gas treatments that may be applied on either sheet, or both, to control van der Waals, hydrogen and covalent bonding between the sheets. The coating layer bonds the sheets together to prevent formation of a permanent bond at high temperature processing while at the same time maintaining a sufficient bond to prevent delamination during high temperature processing.