INFORMATION PROCESSING APPARATUS AND INFORMATION PROCESSING METHOD

An information processing apparatus includes a detection result acquisition unit to acquire, for each of processes performed on a plurality of workpieces, a detection result of a physical quantity that changes according to processing applied to a workpiece; an identification information acquisition...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAGIWARA, Satoshi, TAKAMI, Junichi, TESHIMA, Yu, MIYARA, Gakushi, UMEZAWA, Tomoki
Format:	Patent
Sprache:	eng
Schlagworte:	CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING
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