SEMICONDUCTOR DEVICE

A semiconductor device includes: a first electrode; a first semiconductor layer; a first insulating film extending downward from an upper surface of the first semiconductor layer, the first insulating film being columnar; a second electrode located in the first insulating film, the second electrode...

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Hauptverfasser: NISHIWAKI, Tatsuya, KACHI, Tsuyoshi, TOKUYAMA, Shuhei
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Sprache:eng
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creator NISHIWAKI, Tatsuya
KACHI, Tsuyoshi
TOKUYAMA, Shuhei
description A semiconductor device includes: a first electrode; a first semiconductor layer; a first insulating film extending downward from an upper surface of the first semiconductor layer, the first insulating film being columnar; a second electrode located in the first insulating film, the second electrode extending in a vertical direction, the second electrode being columnar; a second semiconductor layer partially provided in an upper layer portion of the first semiconductor layer, the second semiconductor layer being next to the first insulating film with the first semiconductor layer interposed; a third semiconductor layer partially provided in an upper layer portion of the second semiconductor layer; and a third electrode located higher than the upper surface of the first semiconductor layer, the third electrode overlapping a portion of the first insulating film, a portion of the first semiconductor layer, and a portion of the second semiconductor layer when viewed from above.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title SEMICONDUCTOR DEVICE
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