SEMICONDUCTOR MEMORY DEVICE

According to one embodiment, a semiconductor memory device includes: a stacked body having a stacked structure in which a plurality of conductive layers and a plurality of insulating layers are alternately stacked one by one, the stacked body including a memory region and a dummy region arranged in...

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Hauptverfasser: YOTSUMOTO, Akira, TASHIRO, Kenji, SUDA, Keisuke, ICHINOSE, Daigo, YAMASHITA, Tetsuya
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creator YOTSUMOTO, Akira
TASHIRO, Kenji
SUDA, Keisuke
ICHINOSE, Daigo
YAMASHITA, Tetsuya
description According to one embodiment, a semiconductor memory device includes: a stacked body having a stacked structure in which a plurality of conductive layers and a plurality of insulating layers are alternately stacked one by one, the stacked body including a memory region and a dummy region arranged in a first direction intersecting a stacking direction of the plurality of conductive layers, the dummy region including a first stepped portion in which at least a part of the plurality of conductive layers on an upper layer side is processed in a stepped shape and terminates at an end portion opposite to the memory region in the first direction; and first and second plate-like portions extending in the stacking direction and the first direction in the stacked body at positions in the memory region away from each other in a second direction intersecting the stacking direction and the first direction, the first and second plate-like portions being directly or indirectly connected to each other and terminating in the dummy region, each of the first and second plate-like portions dividing the stacked body excluding at least a part of the end portion of the dummy region in the second direction.
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title SEMICONDUCTOR MEMORY DEVICE
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