Intelligent Wafer-Level Testing of Photonic Devices

Intelligent Wafer-Level Testing of Photonic Devices

A wafer includes a semiconductor substrate, multiple photonics devices and a test coupler. The multiple photonics devices are fabricated on the substrate and have multiple respective ports. The test coupler is disposed on the wafer and is configured to couple an optical test signal between a tester...

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Hauptverfasser: Echeverri, Santiago, Meitav, Nizan, Silber, Amir, Freedman, Barak, Green-Petersen, Allan, Verbist, Jochem
Format: Patent
Sprache:eng
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MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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creator Echeverri, Santiago
Meitav, Nizan
Silber, Amir
Freedman, Barak
Green-Petersen, Allan
Verbist, Jochem
description A wafer includes a semiconductor substrate, multiple photonics devices and a test coupler. The multiple photonics devices are fabricated on the substrate and have multiple respective ports. The test coupler is disposed on the wafer and is configured to couple an optical test signal between a tester and the multiple ports of the multiple photonics devices during testing of the photonics devices.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2023063481A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2023063481A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2023063481A13</originalsourceid><addsrcrecordid>eNrjZDD2zCtJzcnJTE_NK1EIT0xLLdL1SS1LzVEISS0uycxLV8hPUwjIyC_Jz8tMVnBJLctMTi3mYWBNS8wpTuWF0twMym6uIc4euqkF-fGpxQWJyal5qSXxocFGBkbGBmbGJhaGjobGxKkCAIfaLPs</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Intelligent Wafer-Level Testing of Photonic Devices</title><source>esp@cenet</source><creator>Echeverri, Santiago ; Meitav, Nizan ; Silber, Amir ; Freedman, Barak ; Green-Petersen, Allan ; Verbist, Jochem</creator><creatorcontrib>Echeverri, Santiago ; Meitav, Nizan ; Silber, Amir ; Freedman, Barak ; Green-Petersen, Allan ; Verbist, Jochem</creatorcontrib><description>A wafer includes a semiconductor substrate, multiple photonics devices and a test coupler. The multiple photonics devices are fabricated on the substrate and have multiple respective ports. The test coupler is disposed on the wafer and is configured to couple an optical test signal between a tester and the multiple ports of the multiple photonics devices during testing of the photonics devices.</description><language>eng</language><subject>MEASURING ; MEASURING ELECTRIC VARIABLES ; MEASURING MAGNETIC VARIABLES ; PHYSICS ; TESTING</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20230302&amp;DB=EPODOC&amp;CC=US&amp;NR=2023063481A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,777,882,25545,76296</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20230302&amp;DB=EPODOC&amp;CC=US&amp;NR=2023063481A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Echeverri, Santiago</creatorcontrib><creatorcontrib>Meitav, Nizan</creatorcontrib><creatorcontrib>Silber, Amir</creatorcontrib><creatorcontrib>Freedman, Barak</creatorcontrib><creatorcontrib>Green-Petersen, Allan</creatorcontrib><creatorcontrib>Verbist, Jochem</creatorcontrib><title>Intelligent Wafer-Level Testing of Photonic Devices</title><description>A wafer includes a semiconductor substrate, multiple photonics devices and a test coupler. The multiple photonics devices are fabricated on the substrate and have multiple respective ports. The test coupler is disposed on the wafer and is configured to couple an optical test signal between a tester and the multiple ports of the multiple photonics devices during testing of the photonics devices.</description><subject>MEASURING</subject><subject>MEASURING ELECTRIC VARIABLES</subject><subject>MEASURING MAGNETIC VARIABLES</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDD2zCtJzcnJTE_NK1EIT0xLLdL1SS1LzVEISS0uycxLV8hPUwjIyC_Jz8tMVnBJLctMTi3mYWBNS8wpTuWF0twMym6uIc4euqkF-fGpxQWJyal5qSXxocFGBkbGBmbGJhaGjobGxKkCAIfaLPs</recordid><startdate>20230302</startdate><enddate>20230302</enddate><creator>Echeverri, Santiago</creator><creator>Meitav, Nizan</creator><creator>Silber, Amir</creator><creator>Freedman, Barak</creator><creator>Green-Petersen, Allan</creator><creator>Verbist, Jochem</creator><scope>EVB</scope></search><sort><creationdate>20230302</creationdate><title>Intelligent Wafer-Level Testing of Photonic Devices</title><author>Echeverri, Santiago ; Meitav, Nizan ; Silber, Amir ; Freedman, Barak ; Green-Petersen, Allan ; Verbist, Jochem</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2023063481A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2023</creationdate><topic>MEASURING</topic><topic>MEASURING ELECTRIC VARIABLES</topic><topic>MEASURING MAGNETIC VARIABLES</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>Echeverri, Santiago</creatorcontrib><creatorcontrib>Meitav, Nizan</creatorcontrib><creatorcontrib>Silber, Amir</creatorcontrib><creatorcontrib>Freedman, Barak</creatorcontrib><creatorcontrib>Green-Petersen, Allan</creatorcontrib><creatorcontrib>Verbist, Jochem</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Echeverri, Santiago</au><au>Meitav, Nizan</au><au>Silber, Amir</au><au>Freedman, Barak</au><au>Green-Petersen, Allan</au><au>Verbist, Jochem</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Intelligent Wafer-Level Testing of Photonic Devices</title><date>2023-03-02</date><risdate>2023</risdate><abstract>A wafer includes a semiconductor substrate, multiple photonics devices and a test coupler. The multiple photonics devices are fabricated on the substrate and have multiple respective ports. The test coupler is disposed on the wafer and is configured to couple an optical test signal between a tester and the multiple ports of the multiple photonics devices during testing of the photonics devices.</abstract><oa>free_for_read</oa></addata></record>
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subjects MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title Intelligent Wafer-Level Testing of Photonic Devices
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-20T07%3A11%3A57IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Echeverri,%20Santiago&rft.date=2023-03-02&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2023063481A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true